Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi. -- Norwich, William Andrew : Springer, 2004.

xiv, 518 p.; 23 cm.

ISBN 0-8155-1483-2.

Incluye referencias bibliográficas e índice.

Contenido: Thin film materials and devices -- Thin film processes -- Sputtering phenomena -- Sputtering systems -- Deposition of compound thin films -- Structural control of compound thin films: perovskite and nanometer oxide thin films -- Microfabrication by sputtering -- Appendix -- Table A.1.Electric units, their symbols and conversion factors -- Table A.2.Fundamental physical constants.